Fabrication and Characterization of Frequency Selective Terahertz Focal Plane Array and Camera

Hassane Oulachgar,Jacques-Edmond Paultre,Marc Terroux,Francis Provençal,Bruno Fisette, Hélène Spisser,François Berthiaume,Alex Paquet,Michel Doucet,Michel Jacob,Linda Marchese,Francis Généreux, Paul Grenier,Christine Alain,Alain Bergeron

2019 44TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ)（2019）

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摘要

A high performance frequency selective focal plane array (FPA) detector has been developed at INO. The detector array was fabricated using a CMOS compatible microfabrication process. The FPA consists of a 384x288 pixel array, with optimal detection frequency at 515 GHz. The radiometric performance of the detector, at this frequency, was improved by more than fivefold compared to previously reported frequency selective terahertz detector ^[2] .

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关键词

frequency selective terahertz focal plane array,high performance frequency selective focal plane array detector,FPA,detector array,CMOS compatible microfabrication process,384x288 pixel array,optimal detection frequency,frequency selective terahertz detector,frequency 515.0 GHz

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