Barrier Engineering of Lattice Matched AlInGaN/ GaN Heterostructure Toward High Performance E-mode Operation

2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)(2019)

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摘要
Electrical characteristics of lattice matched AlInGaN/GaN high electron mobility transistors with different barrier engineering was studied theoretically by solving drift diffusion equation. The results of the study thoroughly disclose the mitigation of induced polarization charge on lowering Al and In content in barrier resulting in a positive shift of threshold voltage with huge deduction on drain current. The newly designed lattice match double A1 0.54 In 0.12 Ga 0.34 N/ Al 0.18 In 0.04 Ga 0.78 N barrier recess gate HEMT helps to boost the drain current by reducing the access resistance and enhancing the polarization charge density. The proposed HEMT exalted current density and transconductance by two times with significant shift of threshold voltage in positive axis than that of single barrier structure. Conclusively, the high performance novel double barrier recess gate E-mode HEMT will be key for real and efficient high power switching application.
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关键词
AlInGaN/GaN HEMT,Double barrier,recess gate,simulation,Physical models,Drift diffusion,lattice matched
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