130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements

Lucien Schwab,Pierre-Etienne Allain,Louise Banniard,Nicolas Mauran,Denis Lagrange,Alexandre Fafin,Marc Gely,Maxime Hermouet,Guillaume Jourdan,Sebastien Hentz,Ivan Favero,Bernard Legrand

international conference on micro electro mechanical systems（2019）

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Abstract

We show all-optical operation of a VLSI optomechanical micro-resonator designed for high resolution sensing applications. Mechanical resonance frequency is above 100 MHz with Q-factor of 1 000 in air, yielding measurement bandwidth above 100 kHz. We demonstrate low thermomechanical noise floor resolved with exquisite motion detection limit down to 4.10−16 m.Hz−0.5. This performance, enabled by optomechanical transduction, paves the way for very high-speed and ultra-sensitive sensing applications.

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Key words

low thermomechanical noise floor,optomechanical transduction,ultrasensitive sensing applications,all-optical operation,high resolution sensing applications,mechanical resonance frequency,Q-factor,motion detection limit,optomechanical vibrating sensor,high bandwidth-ultrasensitive measurements,VLSI optomechanical microresonator design,frequency 130.0 MHz

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