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Low-Cost, Low-Impedance Polyimide Based Micro-Needle Array (PI-MNA): A Minimally Invasive Flexible Dry Electrode for Surface Bio-Potential Monitoring

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)(2019)

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Abstract
In this work, we propose a minimally invasive dry flexible electrode device containing a micro-needle array entirely based on polyimide (PI-MNA) for surface bio-potential sensing and monitoring. Owing to the spiky tips, extensibility and biocompatibility, the gold-coated PI needles are able to penetrate high resistivity stratum corneum to realize low-impedance and nontoxic skin-electrode contact without tedious skin-preparation and severe invasiveness. The PI-MNA was mainly fabricated via twice of conformal moulding technique without any costly or complicated process. A specific data processing system was developed for PI-MNAs, and satisfactory bio-potentials was recorded.
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Key words
specific data processing system,biocompatibility,low-cost low-impedance polyimide based microneedle array,surface biopotential sensor,surface biopotential monitoring,nontoxic skin-electrode contact,high resistivity stratum corneum,gold-coated PI needles,minimally invasive dry flexible electrode device,PI-MNA,tedious skin-preparation
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