UV to NIR optical properties of IP-Dip, IP-L, and IP-S after two-photon polymerization determined by spectroscopic ellipsometry

OPTICAL MATERIALS EXPRESS(2019)

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摘要
The polymers IP-Dip, IP-L, and IP-S are among the most commonly used photo-resists employed for the rapid prototyping of optical components using two-photon polymerization. Despite the widespread use of these polymers, measured data on their optical properties is scarce. Recently, the refractive index n of these polymers has been determined in the visible and nearinfrared spectral range. However, the accurate optical properties including extinction coefficient kappa in the ultraviolet spectral range have not been reported yet. Here we report on accurate, ellipsometric measurements of the complex dielectric functions of two-photon polymerized IP-Dip, IP-L, and IP-S in the spectral range from 210 nm to 1500 nm. Model dielectric functions composed of oscillators with Lorentz, Gaussian, and Tauc-Lorentz broadenings are presented for all investigated polymers. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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关键词
spectroscopic ellipsometry,optical properties,polymerization,ip-dip,two-photon
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