Untwinned semipolar (10-13) Al x Ga 1−x N layers grown on m -plane sapphire

SEMICONDUCTOR SCIENCE AND TECHNOLOGY(2019)

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摘要
Heteroepitaxial growth of untwinned mono-crystalline semipolar (101?3) Al(x)Ga1?xN更多
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关键词
nitrides,AlGaN,semiconducting aluminium compounds,metalorganic vapour phase epitaxy
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