Patterning of thick electroplated CoPt magnets using SU-8 micromoulds

Recently, electroplated cobalt platinum (CoPt) magnetic films have been developed that afford thick (up to ~100 μm), high-energy-density (up to ~100 kJ/m3) permanent-magnet microstructures. However, the aggressive electroplating conditions have shown to be incompatible with most thick-film photoresist mould materials, making patterning these films an unanswered technical challenge. In this work, i...