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Imaging the Native Inversion Layer under Buried Oxide in Silicon-on-insulator Radio Frequency Device Technology Via Scanning Surface Photovoltage Microscopy

Daminda H. Dahanayaka,Philip V. Kaszuba,Leon Moszkowicz,Randall H. Wells, Franklin J. Alwine,Richard A. Phelps,James A. Slinkman,Andrew A. Wong,Lloyd A. Bumm

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（2019）

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