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An integrated opto-mechatronic system for self-calibration of accelerometer in large dynamic range

Yu Chen,Xiangyu Sun,Long Zhang,Yicheng Wang,Xiaoshi Li,Dongdong Gong,Tianyu Yang,Feng Qin

Sensors and Actuators A: Physical（2019）

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Abstract
A chip-scale opto-electromechanical sensor and actuator integrated MEMS system including an on-chip microvibrator, accelerometer and optical displacement sensing system to self-calibrate the accelerometer.
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Key words
Integrated opto-mechatronic system,Accelerometer self-calibration,Piezoelectric microvibrator,Optical sensing system
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