Influence of laser surface nanotexturing on the friction behaviour of the silicon/sapphire system

Optics & Laser Technology(2020)

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Abstract
•Tribological behavior of silicon textured with LIPSS was compared to polished Si.•The friction coefficient is larger for the textured specimens.•Plastic deformation contribution to friction is larger for textured specimens.•The friction coefficient is larger when sliding in the perpendicular direction.•Thicker tribolayer formation and higher flash temperatures explain the difference.
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Key words
Laser surface texturing,Laser-induced periodic surface structures,LIPSS,Femtosecond laser,Friction,Silicon
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