Fabrication of Partly Encapsulated Vertical Nanoelectrodes for an Intracellular Microelectrode Array
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)（2019）
Key words
Intracellular contact,nanoelectrodes,atomic layer deposition,microelectrode array
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