High performance of multilevel-cell phase change memory device with good endurance reliability

SEMICONDUCTOR SCIENCE AND TECHNOLOGY(2019)

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摘要
Multilevel-cell (MLC) phase change memory (PCM) usually evaluated in the program method, delay or write energy while the endurance characteristic has not been focused on. In this paper, we exploit a staircase-up program and verify method in the current-driven 4 Mb PCM chip to achieve MLC storage. The direct results of the change in the R-I characteristic and resistance distribution during the cycles are displayed. According to the measurement, the PCM device shows four separable resistance levels after 10(6) operation cycles with a decreasing resistance of full-crystalline state. And the resistance drift and read disturb which affect the cell reliability also are briefly tested. The MLC device shows a good performance where four resistance levels can be separated well after 1000 s and the read endurance under 0.3 V is retained up to 10(9) cycles.
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关键词
phase change memory (PCM),multi-level cell (MLC),current driven,staircase-up P&V,high endurance,4Mb PCM device
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