Fluidic Self-Assembly Transfer Technology For Micro-Led Display

international conference on solid state sensors actuators and microsystems(2019)

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摘要
In this paper, we present a demonstration of high yield Fluidic Self-Assembly (FSA) technology to transfer gallium nitride (GaN) microchips which can be used for Micro-LED display. The low melting point alloy on the substrate and the metal electrode of the chip were assembled in heated solution by a simple shaking motion. More than 19,000 blue GaN microchips with 45um in diameter were precisely assembled at 99.90% yield within 1 min. At the chip sizes below 50um, this dramatic improvement in assembly yield was achieved by using a new assembly solution and chip designs. This low cost and fast demonstration has proven that FSA is a suitable mass transfer technology which is applicable to Micro-LED display after some further development.
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关键词
Fluidic Self-Assembly (FSA), low cost, mass transfer technology, GaN microchip, Micro-LED display
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