Experimental studies of a new type of non-contact rotary motors driven by surface acoustic waves

Sensors and Actuators A: Physical(2019)

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摘要
The dependence of the angular velocity of the new motor on the driving voltage, showing the best performance when the inclination angle of the stator is 66°.
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关键词
Ultrasonic motor,Surface acoustic wave,Focusing interdigital transducer,Acoustic streaming
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