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Direct Partition Measurement of Parasitic Resistance Components in Advanced Transistor Architectures

Zuoguang Liu,Heng Wu,Chen Zhang,Xin Miao,Huimei Zhou,Richard Southwick,Tenko Yamashita,Dechao Guo

2019 Symposium on VLSI Technology（2019）

Cited 0|Views31
Key words
parasitic resistance,FinFET,LGAA,VGAA
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