Infrared and mechanical properties of the oxygen-doped non-hydrogenated diamond-like carbon film prepared by pulsed laser deposition

Yong Cheng,Yimin Lu,Guojun Huang,Yanlong Guo,Lin Xi,Sai Wang,Fangtao Tian

Infrared Physics & Technology（2019）

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摘要

•Non-hydrogenated O-doped DLC films were prepared by PLD.•A model of the transforms among different bonds in the O-doped DLC film was founded.•The infrared property of the oxygen-doped DLC films was researched.

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关键词

Non-hydrogenated diamond-like carbon film,Pulsed laser deposition,Oxygen atmosphere,Atomic bond

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