Insights Into The Influence Of Sidewall Morphology On The Light Extraction Efficiency Of Mini-Leds

We systemically investigated the influence of sidewall morphology change based on TMAH etching on the optical performance of mini-LEDs. The dominant feature of prism structures on the sidewall of mini-LEDs with TMAH etching treatment varied from inhomogeneous to homogeneous as the TMAH etching time prolonged. Such prism structures only appeared on the sidewall along direction owing to the anisotropic TMAH etching. Experimental and simulation results demonstrated that these prism structures can effectively improve the light extraction from sidewall and homogenous prism structures on the sidewall function better in out-coupling light.