An optical glass plane angle measuring system with photoelectric autocollimator

Nanotechnology and Precision Engineering(2019)

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摘要
Optical glass is the most widely used optical material. It is necessary to measure its geometric characteristic quickly and reliably to meet the quality of optical glass. A vision measuring system combining photoelectric autocollimation system with high-precision rotary stage is designed to measure the parallelism and angle of optical glass plane. A novel method is proposed to overcome the difficulty of measuring parallelism of optical glass. The model of parallelism and angle measurement is established and the feasibility is analyzed. The image processing algorithm combining Steger algorithm with the least square method is selected. The uncertainty of angle measurement system for angle measurement is 3.0″. The system can solve the problem of measuring the angle of optical glass with high precision and has important significance for optical system.
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关键词
Optical glass,Plane angle,Parallelism,Photoelectric autocollimation system
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