Precision non-contact displacement sensor based on the near-field characteristics of fiber specklegrams

Sensors and Actuators A: Physical(2019)

引用 26|浏览10
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摘要
•A low-cost method to perform precise non-contact displacement measurement by exploiting the near-field chrematistics of fiber specklegrams.•The fiber-optic sensor achieves a resolution and repeatability of 10 nm and a detection range of 3–4 μm at 100 Hz.•Advantages (1) low-cost, (2) compact device envelope, (3) high precision, and (4) insensitivity to sample/target materials.
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关键词
Fiber optics sensor,Displacement,Sensor,Specklegram,Near-field
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