The Phase Composition and Mechanical Properties of Vacuum Coatings Produced from Equiatomic CrFeCoNiMn Alloy

Mechanical experiments and X-ray diffraction studies of high-entropy vacuum coatings produced by vacuum arc evaporation and sputtering in a compressed discharge from the equiatomic CrFeCoNiMn alloy have been performed. It is shown that both techniques lead to the formation of a high-entropy σ phase along with the fcc solid solution. The phase composition of the coatings has been determined. The effect of deposition conditions on the lattice parameter, hardness, reduced elastic modulus, and friction coefficient has been established. The dependence of hardness and elastic modulus of the coatings with 100% fcc phase on the lattice parameter is shown. The friction coefficient and linear wear rate of the coatings in pair with diamond at a load of 2.2 N and a rotational speed of 16 mm/sec have been determined.