Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes

In this work, we present a reprogrammable micro-resonator logic gate designed with an industrial standard process. The device operation is based on altering the resonance frequency of the beam using DC digital inputs. The proposed design methodology reduces design complexity by 4 to 10 times compared to traditional CMOS design techniques and has great potential for improving energy efficiency. The proposed device has been simulated by MEMS+ software provided by Coventor using XMB10_M30 process design kit (PDK) and then exported into Cadence for further simulations and layout creation following XMB10 process provided by X-FAB.