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Characterization method for integrated planar devices at low frequencies (up to 100 MHz)

SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP 2019)(2019)

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Abstract
The characterization of integrated planar devices is a new challenge nowadays. This paper presents a new method and techniques for measuring integrated devices where their operating frequency is lower than 100 MHz. The characterization is performed by using an impedance-meter. This new method consists to measure and to determine the admittance and impedance matrices of the device in low frequencies (up to 110 MHz). These admittance and impedance matrices allow the electronic properties of the component to be determined.
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Key words
integrated planar device,inductor,impedance-meter
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