A New Gas Flow Gyroscope MEMS For Harsh Environment Applications

Gas flow MEMS gyroscope is a replacement technology for classic gyroscope because of its lack of mechanical part. This work reports the creation of a gas flow gyroscope partly integrated and designed to resist shock. Photolithographic and Etching classical processes have been used. Electrical circuit integration has been performed to measure the new sensor capacity. Stability has been tested to insure no deviation. The dependency of temperature differential to rotational speed is linear in accordance with the state of the art. The variation of speed flow shows a decrease of sensibility with a lower speed as predicted. The lack of information about the flows form, place and speed around the detectors induces an incorrect calculation of the measurement range.