Development of MEMS-fabricated bidirectional ECF (electro-conjugate fluid) micropumps

Sensors and Actuators A: Physical（2019）

引用 10|浏览6

暂无评分

摘要

Schematic of the proposed bidirectional ECF micropump.

查看译文

关键词

Hydraulic power source,MEMS,Electro-conjugate fluid (ECF),Micropump,Hydraulic actuator

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要