Granular Aluminum Meandered Superinductors for Quantum Circuits

We design superinductors made of strongly disordered superconductors for implementation in "hybrid" superconducting quantum circuits. The superinductors are fabricated as meandered nanowires made from granular aluminum films. Optimization of the device geometry enables the realization of superinductors with an inductance of approximately 1 mu H and a self-resonance frequency of over 3 GHz. These compact superinductors are attractive for a wide range of applications, from superconducting circuits for quantum computing to microwave elements of cryogenic parametric amplifiers and kinetic inductance photon detectors.