0.5(BaZr0.2 Ti0.8 O3 )-0.5(Ba0.7 Ca0.3 O3 ) thin films deriving from green sol-gel routes
2019 IEEE 8th International Workshop on Advances in Sensors and Interfaces (IWASI)（2019）
Abstract
Lead-free piezoelectric thin films made of 0.5(BaZr
0.2
Ti
0.8
O
3
)-0.5(Ba
0.7
Ca
0.3
O
3
) over Pt/TiO
x
/SiO
2
/Si were synthesized by means of repeated "green" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.
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Key words
sol-gel thin films,BZT-BCT,lead-free piezoelectric materials,
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