An On-line Variable Speed Scanning Method with Machine Learning Based Feedforward Control for Atomic Force Microscopy.
Asian Control Conference（2019）
Key words
feedback controller,scan data,Gaussian process model,scanning time,feedforward control,atomic force microscopy,AFM,low scanning speed,scan trajectory,fast scanning algorithm,feedforward signal,online variable speed scanning method,nanoscale resolution,raster pattern,sample topography prediction
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