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Processes of film-formation and crystallization in catalytically active ‘spin-on glass’ silica films containing Pt and Pd nanoparticles

O.A. Shilova,N.N. Gubanova,V.A. Matveev,A.G. Ivanova, M.Y. Arsentiev,К.E. Pugachev,Е.М. Ivankova,I.Yu. Kruchinina

Journal of Molecular Liquids（2019）

Cited 6|Views13
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Abstract
This research is devoted to the study of the composition and surface morphology of extremely thin ‘spin-on glass’ films (~20–50 nm) doped with Pt and Pd compounds in concentrations depending on the ratio of precursors in TEOS-derived sols, their aging time and heat treatment temperature.
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Key words
TEOS-derived sols,Spin-on glass films,Pt and Pd nanoparticles,Surface morphology,Phase composition,Structure,Catalytic activity
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