Metasurface-Based Waveplates Demonstrated on 300 mm Si CMOS Platform
2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2019）
Abstract
Metasurface-based all-Si waveplates are first demonstrated on 300 mm CMOS platform. The cross-and co-polarization transmittances are characterized. A polarization conversion efficiency of 87% is achieved near 1.6 μm-wavelength. © 2019 The Author(s)
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Key words
Si CMOS platform,metasurface-based waveplates,polarization conversion efficiency,co-polarization transmittances,size 300.0 mm,Si
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