Experimental investigation and modeling of inversion carrier effective mobility in 4H-SiC trench MOSFETs
Solid-State Electronics(2019)
Abstract
•Investigation and modeling of channel mobility in SiC trench MOSFETs are performed.•Channel mobility needs to be evaluated with drift layer resistance removed.•Method for evaluating channel mobility of trench MOSFETs with drift layer is proposed.•Proposed carrier scattering mechanism is not affected by the plane orientation of SiC.
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Key words
SiC,MOSFET,Trench,Mobility,Carrier scattering
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