Micromachining Of Chalcogenide Waveguides By Picosecond Laser
2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2019）
Abstract
Direct laser inscription creates waveguide structures on chalcogenide thin film. Results of Ge2Sb2Te5 and Ge23Sb7Se70 are compared by varying laser powers and translation speeds. (C) 2019 The Author(s)
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Key words
laser powers,micromachining,chalcogenide waveguides,picosecond laser,direct laser inscription,chalcogenide thin film,laser translation speeds,Ge2Sb2Te5,Ge23Sb7Se70
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