Controlling shape memory effects in NiTi thin films grown on Ru seed layer

Kenneth Ainslie,Cory Knick,Gabriel Smith,Jianheng Li, Charles Troxel,Apurva Mehta,Roopali Kukreja

Sensors and Actuators A: Physical（2019）

引用 7|浏览13

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摘要

•NiTi films (120 nm) sputtered on Ru seed layer at 325 °C show crystallization.•Smaller grain size prevents martensitic phase transition near room temperature.•Phase transition from austenite to R-phase is observed for studied NiTi thin films.

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关键词

NiTi thin films,Shape memory effect,Seed layer,X-ray diffraction

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