Characterization of Critical Peak Current and General Model of Interconnect Systems Under Short Pulse-Width Conditions
2019 IEEE International Reliability Physics Symposium (IRPS)(2019)
Abstract
We characterize the critical peak current which causes melting of various metals interconnects under short-pulse conditions. High-current with 100ps pulse width is achieved using an on-die pulse generator. A model incorporating the heating of the metal layer and heat diffusion through the insulator layer is supported by the experimental results. The model accurately describes the relationship between peak current and pulse width (
$20\boldsymbol{\mu} \mathbf{s}$
-100ps), and can be used to generate reliable guidelines for high-current applications.
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Key words
Critical peak current,Metal melting,On-die VCO,Short pulse,Cu/low-k,Al/SiO2,interconnect
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