Evaluation of Hybrid Bonding Interface Quality by Contact Resistivity Measurement

With the rise of hybrid bonding as a solution for fine pitch 3-D integration, new methods are required to evaluate the bonding quality at a wafer level. Contact resistance is widely used for process control but measurements can be corrupted by the 3-D stack complexity and the misalignment of wafers. In order to measure the specific contact resistivity of dual-damascene interconnects and evaluate t...