Diffusion and Reaction Kinetics Governing Surface Blistering in Radio Frequency Sputtered Hydrogenated A-Sixge1-x (0 ≤ X ≤ 1) Thin Films
Thin Solid Films（2019）
关键词
Amorphous silicon germanium,Hydrogen,Annealing,Blisters,Sputtering
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要