Wideband terahertz imaging pixel with a small on-chip antenna in 180 nm CMOS

We propose a Si-CMOS terahertz image sensor to resolve paucity of low-cost and small-size detectors. The imaging pixel consists of an on-chip antenna and an amplifier acting as envelope detector. The pixel uses a microstrip patch antenna for receiving THz waves. However, the antenna's narrow bandwidth and large ground plane size causes major problems. A low-resistivity Si substrate degrades the gain of planar antennas besides the microstrip patch antenna. We introduce an on-chip folded-slot antenna to reduce the pixel size and prevent gain degradation due to the Si substrate. The antenna has a broader bandwidth and higher gain than conventional on-chip slot antenna. We fabricated the patch/folded-slot types of the pixel circuits by using 0.18 mu m CMOS process. Measurement results show that the folded-slot antenna has a broader bandwidth from 850 GHz to 1.05 THz. (C) 2019 The Japan Society of Applied Physics