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Micro-Tethering for Fabrication of Encapsulated Inertial Sensors with High Sensitivity

Ian B. Flader,Yunhan Chen,Yushi Yang,Eldwin J. Ng,Dongsuk D. Shin,David B. Heinz,Lizmarie Comenencia Ortiz,Anne L. Alter,Woosung Park,Kenneth E. Goodson,Thomas W. Kenny

Journal of Microelectromechanical Systems（2019）

引用 8|浏览65
关键词
DRBA,epi-seal,fuse tethering,joule heating,MEMS accelerometer,micro-tethering,silicon fracturing,stiction mitigation,wafer encapsulation
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