Fabrication of Magnetic Calorimeter Arrays with Buried Wiring

IEEE Transactions on Applied Superconductivity(2019)

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Abstract
Future astrophysics missions such as the Lynx X-ray Microcalorimeter will comprise a very large array of X-ray microcalorimeters with greater than 100 000 pixels. One of the major challenges associated with the realization of large format arrays is the fabrication of high-density, high-yield, superconducting wiring between the pixels of the array. An attractive way to overcome this challenge is to...
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Key words
Wiring,Fabrication,Sensor arrays,Inductance,Prototypes,Gold,Energy resolution
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