Study of a Pulsed Post‐discharge Plasma Deposition Process of APTES: Synthesis of Highly Organic Pp‐aptes Thin Films with NH 2 Functionalized Polysilsesquioxane Evidences
Plasma Processes and Polymers（2019）
关键词
microwave discharges,plasma-enhanced chemical vapour deposition (PECVD),plasma polymerization,pulsed discharges,remote plasma processes
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