Origin of the Dry Etch Damage in the Short-Channel Oxide Thin-Film Transistors for High Resolution Display Application
Thin Solid Films（2019）
关键词
Metal oxide thin-film transistor,Back-channel etched thin-film transistor,Dry-etching,Damage,Channel surface contamination,Bonding,Aluminum-doped indium tin zinc oxide
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要