Modeling and Simulation of MEMS Vector Hydrophone for Suppressing Vibration Output

The influence of vibration on the output of hydrophone having a serious disturbance on the measurement of sound. To suppress the output of hydrophone caused by vibration promoting its engineering application, a crafty piezoresistive eight beams vector hydrophone with thick thickness of mass block was designed. The models of presented hydrophone were established. Based on the models, a method optimizing the thickness of mass block to suppress the output caused by vibration, but hardly no influence on the output of hydrophone resulted by sound. The FEM simulation results demonstrate the practicality of this method. The output caused by vibration is minimum and output resulted by sound has hardly influence when the thickness of mass block is 230 μm for the designed hydrophone. This is beneficial to the engineering application of vector hydrophone.