Design Of Signal Processing Circuit Based On Piezoelectric Actuated Fast Steering Mirror

For piezoelectric ceramic driven fast steering mirrors (FSM), the use of an integrated strain transducer driver can reduce the negative effects of hysteresis characteristics and creep characteristics of piezoelectric ceramics, thereby improving the micro-displacement control accuracy. By analyzing the signal characteristics of the sensor, the displacement measuring principle of the resistance strain gauge displacement sensor is introduced. Design and implement conditioning circuits for strain-type displacement sensor signals including signal amplification modules, low-pass filtering modules, and signal-alignment circuits to obtain a voltage signal proportional to the change in displacement. Through theoretical calculation, physical modeling, simulation, and experimental verification, the designed sensor circuit was experimentally verified. The experimental results show that the effective electrical noise of the sensor signal processing circuit is 4.2mV; the resolution of the corresponding piezoelectric ceramic displacement sensor can reach 4.25nm; the bandwidth can reach 3.6kHz, which can effectively improve the bandwidth of the fast mirror control system and control precision.