A Variable Stiffness Strategy For Improving Comprehensive Performances Of Micromachined Electrostatic Switches

Contact bounce, high driving voltage, and poor robustness to process deviations are the main bottlenecks that limit the reliability of MEMS electrostatic switches. In this study, a variable stiffness strategy offers an optimized path to reach the closure position for the movable electrode. In the proposed method, the switching system's stiffness is low enough to reduce the driving voltage at the initial stage but increases rapidly as the movable electrode approaches the closure position for braking. Our experimental results prove that this strategy can suppress contact bounce, reduce pull-in voltage without compromising pull-in time, and also enhance robustness to process deviations, improving the overall reliability of the MEMS switches. Published under license by AlP Publishing.