Power Delivery Network (PDN) Modeling for Backside-PDN Configurations With Buried Power Rails and $mu$ TSVs

In this article, a power delivery network (PDN) modeling framework for backside-PDN configurations is presented. A backside-PDN configuration contains dense microthrough silicon vias (μTSVs) and power/ground metal stack on the backside of the die. This approach separates the PDN from a conventional signaling network of the back-end-of-the-line (BEOL) and improves power integrity and core utilizati...