Modeling And Experiment Of An Inertial Piezoelectric Rotary Actuator

Inertial piezoelectric rotary actuators have been driving interests of researchers major in precision machining and precision positioning. It has great significances to model inertial driving principle more accurately and design rotary actuators with simpler structure and higher resolution. In this paper, an inertial rotary actuator with one piezoelectric element is proposed. The theoretical development and experiments of the actuator are presented. The verification of developed model proves that the model has great potentials on designing and optimizing the stick-slip rotary actuators. The experimental test of the actuator shows that stepping characteristic depends greatly on the input voltage parameters and the frictional force. This designed rotary actuator achieves the minimum resolution of 0.58 mu rad with simple configuration.