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Electrical resistivity and elastic wave propagation anisotropy in glancing angle deposited tungsten and gold thin films

Raya El Beainou,Asma Chargui,Paulo Pedrosa,Alexis Mosset,Sébastien Euphrasie,Pascal Vairac,Nicolas Martin

Applied Surface Science（2019）

Cited 20|Views26
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Abstract
•W and Au films become more porous with increasing incident angle.•Electrical resistivity and surface elastic wave propagation are measured.•Anisotropic behaviors are evident in W tilted columnar films.•W films exhibit a fan-like columnar morphology whereas Au columns are rather isotropic.
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Key words
Glancing angle deposition,Tungsten,Gold,Columnar films,Surface acoustic wave,Resistivity,Anisotropy
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