Electrical resistivity and elastic wave propagation anisotropy in glancing angle deposited tungsten and gold thin films
Applied Surface Science(2019)
Abstract
•W and Au films become more porous with increasing incident angle.•Electrical resistivity and surface elastic wave propagation are measured.•Anisotropic behaviors are evident in W tilted columnar films.•W films exhibit a fan-like columnar morphology whereas Au columns are rather isotropic.
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Key words
Glancing angle deposition,Tungsten,Gold,Columnar films,Surface acoustic wave,Resistivity,Anisotropy
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