Complementary Integrated Circuits Based on n-Type and p-Type Oxide Semiconductors for Applications Beyond Flat-Panel Displays
IEEE Transactions on Electron Devices（2019）
Abstract
Oxide semiconductors are highly attractive for fabrication of large-area thin-film electronics because of their high electrical performance, low process temperature, high uniformity, and ease of industrial manufacturing. n-type oxide semiconductors, such as InGaZnO, are highly developed and have already been commercialized for backplane drivers of flat-panel displays. To date, developing CMOS tech...
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Key words
Inverters,Integrated circuits,Thin film transistors,Logic gates,Sputtering,Standards,Lithography
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