Integration of atomically thin layers of transition metal dichalcogenides into high-Q, monolithic Bragg-cavities: an experimental platform for the enhancement of the optical interaction in 2D-materials

We demonstrate a new approach to integrate single layer MoSe2 and WSci(2) flakes into monolithic all-dielectric planar high-quality micro-cavities. These distributed-Braggreflector (DBR) cavities may, e.g., be tuned to match the exciton resonance of the 2D-materials. They are highly robust and compatible with cryogenic and room-temperature operation. The integration is achieved by a customized ion-assisted physical vapor deposition technique. which does not degrade the optical properties of the 2D-materials. The monolithic 2D-resonator is shown to have a high Q-factor in excess of 4500. We use photoluminescence (PL) experiments to demonstrate that the coating procedure with a SiO2 coating on a prepared surface does not significantly alter the electrooptical properties of the 2D-materials. Moreover, we observe a resonance induced modification of the PL-spectrum for the DBR embedded flake. Our system thus represents a versatile platform to resonantly enhance and tailor light-matter-interaction in 2D-materials. The gentle processing conditions would also allow the integration of other sensitive materials into these highly resonant structures. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement