Temperature Modulated Operation of SnO2-Based Gas Sensor Arrays

2018 12th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)(2018)

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Abstract
Metal oxide (MOx) gas sensor find widespread use as low-cost sensors in different applications like ambient air quality control. Their functionality is largely governed by adsorption and desorption processes of oxygen and its reaction with surrounding gas molecules. Characteristic sensor responses for specific gas species and their concentrations are observed due to different gas specific reaction rates. Sensor operation at different temperatures turned out to influence these reactions. In this work, we present and compare different temperature modulated operation modes for SnO2 based MOx gas sensors, for single sensors and sensor arrays. By using simple resistance based features, this allows us to distinguish gases and quantify their concentrations.
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Key words
temperature modulated operation,metal oxide gas sensor,low-cost sensors,ambient air quality control,adsorption,gas molecules,characteristic sensor responses,specific gas species,sensor operation,gas sensor arrays,gas specific reaction rates,MOx gas sensor,SnO2
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