High Sensitive Fiber Bragg Grating Vibration Sensor Based on Quartz Diaphragm

In view of the plastic deformation of the metal diaphragm, a cantilevered beam fiber Bragg grating (FBG) vibration sensor based on quartz diaphragm is designed. The relationship between the structural parameters of the sensor, the sensitivity and the harmonic vibration frequency is theoretically analyzed and optimized. Samples of sensors were produced and the sensor's acceleration sensitivity and frequency response were tested. The results show that the harmonic vibration frequency of the sensor is 52HZ, and the acceleration sensitivity below 40HZ can reach 785pm/g.